가시 금속렌즈의 초당 300개 롤투롤 제조

Abstract Metasurfaces have been extensively studied over the past decade for their ability to manipulate light at subwavelength scales1. One of the most critical trends emerging recently has been scalable manufacturing, which is paving the way for the commercialization and industrial adoption of metasurfaces2,3. However, the production throughput of metasurfaces has so far largely remained at the academic level, limiting their practical deployment. Here we demonstrate the roll-to-roll nanoimprinting of visible metalenses for large-scale, cost-effective and fully automated manufacturing at industrial-level throughput. Our system achieves a production rate of 300 metalenses per second, with a cost comparable with—or even lower than—that of conventional refractive optics. A conformal high-index titanium dioxide layer is deposited via atomic layer deposition to dramatically enhance optical performance. Experimental characterization confirms high optical efficiency and uniformity across the full patterned area, with consistently high yields. This work shows potential for the transition of metasurface technology from academic research to the real world. Access options Access Nature and 54 other Nature Portfolio journals Get Nature+, our best-value online-access subscription 27,99 € / 30 days cancel any time Buy this article 39,95 € Prices may be subject to local taxes which are calculated during checkout Similar content being viewed by others Data availability The data supporting the findings of this study are available from the corresponding authors on reasonable request. References Khorasaninejad, M. et al. Metalenses at visible wavelengths: diffraction-limited focusing and subwavelength resolution imaging. Science 352, 1190–1194 (2016). Kim, J. et al. Scalable manufacturing of high-index atomic layer–polymer hybrid metasurfaces for metaphotonics in the visible. Nat. 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RS-2020-NR049544, RS-2022-NR067559, RS-2024-00356928, RS-2024-00462912, RS-2024-00337012, RS-2024-00408286, RS-2024-00416272 and RS-2025-02217649) funded by the Ministry of Science and ICT of the Korean government, and the Korea Planning and Evaluation Institute of Industrial Technology (grant no. 1415185027/20019169; Alchemist project) funded by the Ministry of Trade, Industry and Energy of the Korean government. This research was also supported by a Korean ARPA-H Project grant through the Korea Health Industry Development Institute, funded by the Ministry of Health and Welfare, Republic of Korea (grant no. RS-2025-25454431). I.K. acknowledges the NRF Sejong Science Fellowship (grant no. RS-2021-NR061797) funded by the MSIT of the Korean government. Y.P. and J.K. acknowledge the Presidential Science fellowship funded by the MSIT of the Korean government. J.K. acknowledges the Asan Foundation Biomedical Science fellowship, and Presidential Sejong Science fellowship (RS-2026-25497644) funded by the MSIT of the Korean government. K.K. acknowledges the NRF Ph.D. fellowship (grant no. RS-2025-25436773) funded by the Ministry of Education of the Korean government. Author information Authors and Affiliations Contributions J.R., I.K. and G.C. conceived the idea and initiated the project. T.H., G.C., I.K., J.R., Y.P. and J.K. designed the experiments. J.K., Y.P. and K.K. performed the theoretical studies and numerical simulations of the metalenses. Y.P., J.K., D.K. G.J., K.-I.L. and D.H.Y. contributed to the master mould and flexible polymer shim fabrication. T.H. developed and optimized the R2R manufacturing process, and carried out structural characterizations and analyses of the R2R-imprinted metalenses. T.H., H.T., S.P. and B.J.R. performed the R2R manufacturing process of the metalenses. Y.P., J.K. and K.K. characterized and analysed the optical data of the R2R-imprinted metalenses. T.H., Y.P., J.K., G.C., I.K. and J.R. mainly wrote the manuscript. All of the authors approved the final manuscript. J.R., G.C. and I.K. guided the entire work. Corresponding authors Ethics declarations Competing interests The authors declare no competing interests. Peer review Peer review information Nature thanks L. Jay Guo who co-reviewed with Wei-Kuan Lin; and the other, anonymous reviewer(s) for their contribution to the peer review of this work. Peer reviewer reports are available. Additional information Publisher’s note Springer Nature remains neutral with regard to jurisdictional claims in published maps and institutional affiliations. Extended data figures and tables (a) Photograph of the 300-mm wafer master stamp. (b, c) SEM images of the as-fabricated master stamp. (d) Photograph of the corresponding flexible replica mould. (e, f) SEM images of the as-fabricated replica mould. (a.i–d.vi) SEM images of the replica mould: (a.i) before R2R imprinting, (b.ii) after 10 m, (c.iv) after 100 m, and (d.vi) after 200 m of R2R imprinting. (b.iii–d.vii) Corresponding SEM images of the imprinted resin structures: (b.iii) after 10 m, (c.v) after 100 m, and (d.vii) after 200 m of R2R imprinting. (a-e) SEM images (top and tilted) at different positions of R2R-imprinted metalenses taken at (a. i-iii) 10 m, (b. iv-vi) 100 m, and (c. vii-ix) 200 m. (a) Cross-sectional intensity profiles along the x-axis at the focal plane (solid lines) compared with simulated results (dashed lines) for each wavelength. (b) Modulation transfer function (MTF) analysis showing the spatial frequency response of the fabricated metalens (solid lines) and theoretical design (dashed lines) at different wavelengths. Imaging results of the fabricated metalens using a negative 1951 USAF resolution target under (a) 450 nm, (b) 532 nm, and (c) 635 nm illumination, where all elements from groups 6 and 7 are imaged. Supplementary information Supplementary Notes 1–9, Figs. 1–9, Table 1 and references. The materials provide detailed descriptions of the roll-to-roll manufacturing platform, design principles of visible metalenses, process optimization, extended structural characterization and comparative analysis with related works Operation of roll-to-roll manufacturing of the metalens. This video demonstrates the continuous roll-to-roll manufacturing process of metalens in real time, followed by rewinding of high-volume imprinted products showing vivid structural colours under white-light illumination Rights and permissions Springer Nature or its licensor (e.g. a society or other partner) holds exclusive rights to this article under a publishing agreement with the author(s) or other rightsholder(s); author self-archiving of the accepted manuscript version of this article is solely governed by the terms of such publishing agreement and applicable law. About this article Cite this article Hoang, T., Park, Y., Kim, J. et al. 300-unit-per-second roll-to-roll manufacturing of visible metalenses. Nature (2026). https://doi.org/10.1038/s41586-026-10369-y Received: Accepted: Published: Version of record: DOI: https://doi.org/10.1038/s41586-026-10369-y